Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824616 | Substrate processing method and substrate processing system | Takahiro Kitano, Shinichi Sugimoto, Shinji Kobayashi, Naoya Hirakawa, Akira Fukutomi | 2004-11-30 |
| 6773510 | Substrate processing unit | Takahiro Kitano, Shinichi Sugimoto, Shinji Kobayashi, Naoya Hirakawa, Akira Fukutomi | 2004-08-10 |
| 6716478 | Coating film forming apparatus and coating film forming method | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Norihisa Koga, Kazuhiro Takeshita +2 more | 2004-04-06 |
| 6676757 | Coating film forming apparatus and coating unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Norihisa Koga, Kazuhiro Takeshita +2 more | 2004-01-13 |