Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824616 | Substrate processing method and substrate processing system | Takahiro Kitano, Shinichi Sugimoto, Shinji Kobayashi, Akira Fukutomi, Nobukazu Ishizaka | 2004-11-30 |
| 6808566 | Reduced-pressure drying unit and coating film forming method | Takahiro Kitano, Manabu Hama, Shinichi Sugimoto | 2004-10-26 |
| 6773510 | Substrate processing unit | Takahiro Kitano, Shinichi Sugimoto, Shinji Kobayashi, Akira Fukutomi, Nobukazu Ishizaka | 2004-08-10 |