MH

Manabu Hama

TL Tokyo Electron Limited: 1 patents #120 of 414Top 30%
Overall (2004): #163,789 of 270,089Top 65%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6808566 Reduced-pressure drying unit and coating film forming method Takahiro Kitano, Shinichi Sugimoto, Naoya Hirakawa 2004-10-26