Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824616 | Substrate processing method and substrate processing system | Takahiro Kitano, Shinji Kobayashi, Naoya Hirakawa, Akira Fukutomi, Nobukazu Ishizaka | 2004-11-30 |
| 6808566 | Reduced-pressure drying unit and coating film forming method | Takahiro Kitano, Manabu Hama, Naoya Hirakawa | 2004-10-26 |
| 6776845 | Coating film forming method and system | Tomohide Minami, Takahiro Kitano, Jun Ookura, Hiroaki Kurishima | 2004-08-17 |
| 6773510 | Substrate processing unit | Takahiro Kitano, Shinji Kobayashi, Naoya Hirakawa, Akira Fukutomi, Nobukazu Ishizaka | 2004-08-10 |
| 6722411 | Mounting apparatus and mounting method | Katsunori Nagata, Masaaki Ooga, Toshihiko Nakagawa | 2004-04-20 |