YE

Yukihiko Esaki

TL Tokyo Electron Limited: 3 patents #24 of 414Top 6%
Overall (2004): #17,470 of 270,089Top 7%
3
Patents 2004

Issued Patents 2004

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
6716478 Coating film forming apparatus and coating film forming method Takahiro Kitano, Masateru Morikawa, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more 2004-04-06
6695922 Film forming unit Takahiro Kitano, Shinji Kobayashi, Masateru Morikawa 2004-02-24
6676757 Coating film forming apparatus and coating unit Takahiro Kitano, Masateru Morikawa, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more 2004-01-13