Issued Patents 2004
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833914 | System and method for efficient simulation of reflectometry response from two-dimensional grating structures | Junwei Bao, Xinhui Niu | 2004-12-21 |
| 6792328 | Metrology diffraction signal adaptation for tool-to-tool matching | Michael Laughery, David Wasinger | 2004-09-14 |
| 6785638 | Method and system of dynamic learning through a regression-based library generation process | Xinhui Niu | 2004-08-31 |
| 6772084 | Overlay measurements using periodic gratings | Joerg Bischoff, Xinhui Niu | 2004-08-03 |
| 6768983 | System and method for real-time library generation of grating profiles | Michael Laughery | 2004-07-27 |
| 6750961 | System and method for characterizing macro-grating test patterns in advanced lithography and etch processes | Xinhui Niu | 2004-06-15 |
| 6743646 | Balancing planarization of layers and the effect of underlying structure on the metrology signal | Xinhui Niu | 2004-06-01 |
| 6721691 | Metrology hardware specification using a hardware simulator | Junwei Bao | 2004-04-13 |
| 6699624 | Grating test patterns and methods for overlay metrology | Xinhui Niu | 2004-03-02 |