Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833914 | System and method for efficient simulation of reflectometry response from two-dimensional grating structures | Xinhui Niu, Nickhil Jakatdar | 2004-12-21 |
| 6775015 | Optical metrology of single features | Joerg Bischoff, Xinhui Niu | 2004-08-10 |
| 6721691 | Metrology hardware specification using a hardware simulator | Nickhil Jakatdar | 2004-04-13 |