Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6804005 | Overlay measurements using zero-order cross polarization measurements | Xinhui Niu | 2004-10-12 |
| 6775015 | Optical metrology of single features | Xinhui Niu, Junwei Bao | 2004-08-10 |
| 6772084 | Overlay measurements using periodic gratings | Xinhui Niu, Nickhil Jakatdar | 2004-08-03 |