Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6792328 | Metrology diffraction signal adaptation for tool-to-tool matching | David Wasinger, Nickhil Jakatdar | 2004-09-14 |
| 6768983 | System and method for real-time library generation of grating profiles | Nickhil Jakatdar | 2004-07-27 |