Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6723654 | Method and apparatus for in-situ descum/hot bake/dry etch photoresist/polyimide layer | Kuei-Jen Chang, Juei-Wen Lin, Jen-Yung Tseng | 2004-04-20 |
| 6706601 | Method of forming tiny silicon nitride spacer for flash EPROM by using dry+wet etching technology | Hung-Hsin Liu, Kwang-Chen Wu, How-Cheng Tsai, Shih-Shun Chen | 2004-03-16 |