KC

Kuei-Jen Chang

TSMC: 1 patents #234 of 898Top 30%
Overall (2004): #172,511 of 270,089Top 65%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6723654 Method and apparatus for in-situ descum/hot bake/dry etch photoresist/polyimide layer Yuan-Ko Hwang, Juei-Wen Lin, Jen-Yung Tseng 2004-04-20