Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6723654 | Method and apparatus for in-situ descum/hot bake/dry etch photoresist/polyimide layer | Yuan-Ko Hwang, Juei-Wen Lin, Jen-Yung Tseng | 2004-04-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6723654 | Method and apparatus for in-situ descum/hot bake/dry etch photoresist/polyimide layer | Yuan-Ko Hwang, Juei-Wen Lin, Jen-Yung Tseng | 2004-04-20 |