JL

Juei-Wen Lin

TSMC: 1 patents #234 of 898Top 30%
Overall (2004): #184,415 of 270,089Top 70%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6723654 Method and apparatus for in-situ descum/hot bake/dry etch photoresist/polyimide layer Kuei-Jen Chang, Yuan-Ko Hwang, Jen-Yung Tseng 2004-04-20