JT

Jen-Yung Tseng

TSMC: 1 patents #234 of 898Top 30%
Overall (2004): #194,887 of 270,089Top 75%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6723654 Method and apparatus for in-situ descum/hot bake/dry etch photoresist/polyimide layer Kuei-Jen Chang, Yuan-Ko Hwang, Juei-Wen Lin 2004-04-20