Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830653 | Plasma processing method and apparatus | Tomohiro Okumura, Izuru Matsuda, Takayuki Kai, Mitsuo Saitoh | 2004-12-14 |
| 6707253 | Matching circuit and plasma processing apparatus | Kenji Sumida, Tomohiro Okumura, Ichiro Nakayama, Kibatsu Shinohara, Minoru Kanda +1 more | 2004-03-16 |