Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830653 | Plasma processing method and apparatus | Yukihiro Maegawa, Izuru Matsuda, Takayuki Kai, Mitsuo Saitoh | 2004-12-14 |
| 6808759 | Plasma processing method and apparatus | Hideo Haraguchi, Takuya Matsui, Izuru Matsuda, Akio Mitsuhashi | 2004-10-26 |
| 6707253 | Matching circuit and plasma processing apparatus | Kenji Sumida, Yukihiro Maegawa, Ichiro Nakayama, Kibatsu Shinohara, Minoru Kanda +1 more | 2004-03-16 |