Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830653 | Plasma processing method and apparatus | Tomohiro Okumura, Yukihiro Maegawa, Takayuki Kai, Mitsuo Saitoh | 2004-12-14 |
| 6808759 | Plasma processing method and apparatus | Tomohiro Okumura, Hideo Haraguchi, Takuya Matsui, Akio Mitsuhashi | 2004-10-26 |