Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6784080 | Method of manufacturing semiconductor device by sputter doping | Bunji Mizuno, Hiroaki Nakaoka, Michihiko Takase | 2004-08-31 |
| 6707253 | Matching circuit and plasma processing apparatus | Kenji Sumida, Tomohiro Okumura, Yukihiro Maegawa, Kibatsu Shinohara, Minoru Kanda +1 more | 2004-03-16 |