Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780547 | Halftone phase shifting photomask and blanks for halftone phase shifting photomask therefor and a method for forming pattern by using the halftone phase shifting photomask | Toshiaki Motonaga, Norihito Ito, Chiaki Hatsuta, Junji Fujikawa, Naoya Hayashi +3 more | 2004-08-24 |
| 6721390 | Soft X-ray reduction projection exposure system, soft X-ray reduction projection exposure method and pattern formation method | Masaru Sasago | 2004-04-13 |
| 6709791 | Halftone phase shift photomask and blanks for halftone phase shift photomask for it and pattern forming method using this | Hiroshi Mohri, Toshiaki Motonaga, Chiaki Hatsuta, Norihito Ito, Naoya Hayashi +3 more | 2004-03-23 |