Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780547 | Halftone phase shifting photomask and blanks for halftone phase shifting photomask therefor and a method for forming pattern by using the halftone phase shifting photomask | Toshiaki Motonaga, Norihito Ito, Chiaki Hatsuta, Naoya Hayashi, Toshio Onodera +3 more | 2004-08-24 |
| 6764792 | Halftone phase shift photomask and blanks for halftone phase shift photomask for producing it | Yoshinori Kinase, Takafumi Okamura, Hiroshi Mohri, Toshifumi Yokoyama, Haruo Kokubo | 2004-07-20 |
| 6740455 | Photomask | Kenji Noguchi, Toshiaki Motonaga, Hiro-o Nakagawa, Yasutaka Morikawa, Toshifumi Yokoyama +3 more | 2004-05-25 |