Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6764792 | Halftone phase shift photomask and blanks for halftone phase shift photomask for producing it | Junji Fujikawa, Yoshinori Kinase, Takafumi Okamura, Toshifumi Yokoyama, Haruo Kokubo | 2004-07-20 |
| 6709791 | Halftone phase shift photomask and blanks for halftone phase shift photomask for it and pattern forming method using this | Toshiaki Motonaga, Chiaki Hatsuta, Norihito Ito, Naoya Hayashi, Toshio Onodera +3 more | 2004-03-23 |