Issued Patents 2004
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830869 | Pattern forming material and method of pattern formation | Shinji Kishimura, Masayuki Endo, Mitsuru Ueda, Tsuyohiko Fujigaya | 2004-12-14 |
| 6824955 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masayuki Endo, Shinji Kishimura +3 more | 2004-11-30 |
| 6806029 | Pattern formation material and pattern formation method | Shinji Kishimura, Masayuki Endo, Mitsuru Ueda, Tsuyohiko Fujigaya | 2004-10-19 |
| 6790586 | Resist compositions and patterning process | Jun Hatakeyama, Yuji Harada, Jun Watanabe, Yoshio Kawai, Masayuki Endo +5 more | 2004-09-14 |
| 6764811 | Pattern formation method | Masayuki Endo | 2004-07-20 |
| 6753132 | Pattern formation material and pattern formation method | Shinji Kishimura, Masayuki Endo, Masamitsu Shirai, Masahiro Tsunooka | 2004-06-22 |
| 6737213 | Pattern formation material and method | Shinji Kishimura, Masamitsu Shirai, Masahir Tsunooka | 2004-05-18 |
| 6721390 | Soft X-ray reduction projection exposure system, soft X-ray reduction projection exposure method and pattern formation method | Takahiro Matsuo | 2004-04-13 |
| 6716730 | Pattern formation method | Masayuki Endo | 2004-04-06 |
| 6710148 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Jun Watanabe, Yoshio Kawai, Masayuki Endo +5 more | 2004-03-23 |
| 6689536 | Pattern formation material and pattern formation method | Shinji Kishimura, Masayuki Endo, Masamitsu Shirai, Masahiro Tsunooka | 2004-02-10 |
| 6673523 | Pattern formation method | Shinji Kishimura, Akiko Katsuyama | 2004-01-06 |