Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6707253 | Matching circuit and plasma processing apparatus | Kenji Sumida, Tomohiro Okumura, Yukihiro Maegawa, Ichiro Nakayama, Kibatsu Shinohara +1 more | 2004-03-16 |
SM
Shiniti Matamura
Overall (2004): #116,162 of 270,089Top 45%
1
Patents 2004