Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835292 | Electrochemical thin film polishing method and polishing apparatus | Yuji Segawa, Akira Yoshiq, Takeshi Nogami | 2004-12-28 |
| 6808617 | Electrolytic polishing method | Yuji Segawa, Akira Yoshio, Takeshi Nogami | 2004-10-26 |
| 6797623 | Methods of producing and polishing semiconductor device and polishing apparatus | Yuji Segawa, Akira Yoshio, Hiizu Ootorii, Zenya Yasuda, Masao Ishihara +2 more | 2004-09-28 |
| 6722962 | Polishing system, polishing method, polishing pad, and method of forming polishing pad | Hiizu Ohtorii, Yasuharu Ohkawa, Yutaka Ozawa, Taiichi Kusano | 2004-04-20 |
| 6695682 | Polishing method and polishing apparatus | Takashi Suzuki | 2004-02-24 |
| 6693036 | Method for producing semiconductor device polishing apparatus, and polishing method | Takeshi Nogami, Akira Yoshio | 2004-02-17 |