Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835292 | Electrochemical thin film polishing method and polishing apparatus | Shuzo Sato, Akira Yoshiq, Takeshi Nogami | 2004-12-28 |
| 6808617 | Electrolytic polishing method | Shuzo Sato, Akira Yoshio, Takeshi Nogami | 2004-10-26 |
| 6797623 | Methods of producing and polishing semiconductor device and polishing apparatus | Shuzo Sato, Akira Yoshio, Hiizu Ootorii, Zenya Yasuda, Masao Ishihara +2 more | 2004-09-28 |