Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6722962 | Polishing system, polishing method, polishing pad, and method of forming polishing pad | Shuzo Sato, Hiizu Ohtorii, Yutaka Ozawa, Taiichi Kusano | 2004-04-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6722962 | Polishing system, polishing method, polishing pad, and method of forming polishing pad | Shuzo Sato, Hiizu Ohtorii, Yutaka Ozawa, Taiichi Kusano | 2004-04-20 |