Issued Patents 2004
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794198 | MOCVD selective deposition of c-axis oriented Pb5Ge3O11 thin films on high-k gate oxides | Tingkai Li, Sheng Teng Hsu, Bruce D. Ulrich | 2004-09-21 |
| 6777327 | Method of barrier metal surface treatment prior to Cu deposition to improve adhesion and trench filling characteristics | Wei Pan, Jer-Shen Maa, Sheng Teng Hsu | 2004-08-17 |
| 6774054 | High temperature annealing of spin coated Pr1-xCaxMnO3 thim film for RRAM application | Fengyan Zhang, Wei-Wei Zhuang, Sheng Teng Hsu | 2004-08-10 |
| 6764537 | Copper metal precursor | Wei-Wei Zhuang, Lawrence J. Charneski, Sheng Teng Hsu | 2004-07-20 |
| 6759695 | Integrated circuit metal oxide semiconductor transistor | Yanjun Ma, Douglas J. Tweet | 2004-07-06 |
| 6723643 | Method for chemical mechanical polishing of thin films using end-point indicator structures | Wei Pan, Allen Burmaster | 2004-04-20 |
| 6720031 | Method of controlling the initial growth of CVD copper films by surface treatment of barrier metals films | Wei Pan, Sheng Teng Hsu | 2004-04-13 |
| 6716691 | Self-aligned shallow trench isolation process having improved polysilicon gate thickness control | Sheng Teng Hsu, Bruce D. Ulrich, Douglas J. Tweet, Lisa Stecker | 2004-04-06 |
| 6716744 | Ultra thin tungsten metal films used as adhesion promoter between barrier metals and copper | Wei Pan, Sheng Teng Hsu | 2004-04-06 |