Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830852 | Stencil reticles for use in charged-particle-beam microlithography, and pattern-determination methods for such reticles | Shintaro Kawata, Shinichi Takahashi | 2004-12-14 |
| 6815693 | Charged-particle-beam microlithography apparatus and methods including proximity-effect correction | Kazuya Okamoto, Teruaki Okino | 2004-11-09 |