Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815693 | Charged-particle-beam microlithography apparatus and methods including proximity-effect correction | Koichi Kamijo, Teruaki Okino | 2004-11-09 |
| 6765217 | Charged-particle-beam mapping projection-optical systems and methods for adjusting same | Hiroshi Nishimura, Naoto Kihara, Kinya Kato, Toru Takagi, Akihiro Goto +1 more | 2004-07-20 |
| 6707240 | Electron gun and electron beam exposure device | Mamoru Nakasuji | 2004-03-16 |