Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815693 | Charged-particle-beam microlithography apparatus and methods including proximity-effect correction | Koichi Kamijo, Kazuya Okamoto | 2004-11-09 |
| 6680481 | Mark-detection methods and charged-particle-beam microlithography methods and apparatus comprising same | — | 2004-01-20 |