Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831281 | Methods and devices for detecting and canceling magnetic fields external to a charged-particle-beam (CPB) optical system, and CPB microlithography apparatus and methods comprising same | — | 2004-12-14 |
| 6707240 | Electron gun and electron beam exposure device | Kazuya Okamoto | 2004-03-16 |