Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830852 | Stencil reticles for use in charged-particle-beam microlithography, and pattern-determination methods for such reticles | Koichi Kamijo, Shinichi Takahashi | 2004-12-14 |
| 6767691 | Scattering-reticle assemblies for electron-beam microlithography including a scattering-stencil reticle portion and a scattering-membrane reticle portion | — | 2004-07-27 |