Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835507 | Mask for use in measuring flare, method of manufacturing the mask, method of identifying flare-affected region on wafer, and method of designing new mask to correct for flare | Won-tai Ki, Seong-woon Choi, Tae-Moon Jeong, Shun-Yong Zinn, Jung Min Sohn | 2004-12-28 |
| 6835529 | Polymer having butadiene sulfone repeating unit and resist composition comprising the same | Sang-jun Choi, Sang-Gyun Woo | 2004-12-28 |