Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835507 | Mask for use in measuring flare, method of manufacturing the mask, method of identifying flare-affected region on wafer, and method of designing new mask to correct for flare | Won-tai Ki, Seong-woon Choi, Shun-Yong Zinn, Woo-Sung Han, Jung Min Sohn | 2004-12-28 |