Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821572 | Method of cleaning a chemical vapor deposition chamber | Kwang-Jin Moon, Gil-Heyun Choi, Sang-Bum Kang | 2004-11-23 |
| 6777322 | Method for fabricating a multi-layered dielectric layer including insulating layer having Si-CH3 bond therein | Hyun Dam Jeong, Hong-Jae Shin, Byeong-Jun Kim | 2004-08-17 |