Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821572 | Method of cleaning a chemical vapor deposition chamber | Kwang-Jin Moon, Gil-Heyun Choi, Hee-Sook Park | 2004-11-23 |
| 6806135 | Method of manufacturing a semiconductor device using a two-step deposition process | Hyun-Seok Lim, In-Sun Park, Jong-Sik Chun, Seong-Geon Park, In-su Ha | 2004-10-19 |
| 6787460 | Methods of forming metal layers in integrated circuit devices using selective deposition on edges of recesses and conductive contacts so formed | Hyo-Jong Lee, Seung-Man Choi, Gil-Heyun Choi | 2004-09-07 |