Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6777349 | Hermetic silicon carbide | Haiying Fu, Ka Shun Wong, Xingyuan Tang, Judy H. Huang | 2004-08-17 |
| 6764952 | Systems and methods to retard copper diffusion and improve film adhesion for a dielectric barrier on copper | Jengyi Yu, Ka Shun Wong, Sanjeev Kumar Jain, Somnath Nag, Haiying Fu +1 more | 2004-07-20 |
| 6720251 | Applications and methods of making nitrogen-free anti-reflective layers for semiconductor processing | Ming Li, Jason Tian, Tom Mountsier, M. Zlaul Karim | 2004-04-13 |
| 6716765 | Plasma clean for a semiconductor thin film deposition chamber | Aree Hanprasopwattana, Edward Augustyniak, Jason Tian | 2004-04-06 |