Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6720251 | Applications and methods of making nitrogen-free anti-reflective layers for semiconductor processing | Bart J. van Schravendijk, Ming Li, Tom Mountsier, M. Zlaul Karim | 2004-04-13 |
| 6716765 | Plasma clean for a semiconductor thin film deposition chamber | Aree Hanprasopwattana, Edward Augustyniak, Bart J. van Schravendijk | 2004-04-06 |