Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800576 | Aluminum nitride sintered bodies and members for semiconductor-producing apparatuses | Yuji Katsuda | 2004-10-05 |
| 6785115 | Electrostatic chuck and substrate processing apparatus | Satoru Yamada, Kiyoshi Nashimoto, Naoki Miyazaki | 2004-08-31 |
| 6728091 | Electrostatic adsorption device | Masahito Eguchi, Tetsuya Kawajiri, Ikuhisa Morioka | 2004-04-27 |