Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800576 | Aluminum nitride sintered bodies and members for semiconductor-producing apparatuses | Hideyoshi Tsuruta | 2004-10-05 |
| 6783875 | Halogen gas plasma-resistive members and method for producing the same, laminates, and corrosion-resistant members | Hirotake Yamada, Tsuneaki Ohashi, Masaaki Masuda, Masashi Harada, Hiroyuki Iwasaki +1 more | 2004-08-31 |