NM

Naoki Miyazaki

AN Anelva: 1 patents #5 of 49Top 15%
NI Ngk Insulators: 1 patents #76 of 176Top 45%
Overall (2004): #147,701 of 270,089Top 55%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6785115 Electrostatic chuck and substrate processing apparatus Hideyoshi Tsuruta, Satoru Yamada, Kiyoshi Nashimoto 2004-08-31