Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6785115 | Electrostatic chuck and substrate processing apparatus | Hideyoshi Tsuruta, Satoru Yamada, Kiyoshi Nashimoto | 2004-08-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6785115 | Electrostatic chuck and substrate processing apparatus | Hideyoshi Tsuruta, Satoru Yamada, Kiyoshi Nashimoto | 2004-08-31 |