Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822342 | Raised-lines overlay semiconductor targets and method of making the same | Scott DeBoer, Ceredig Roberts, Tim H. Bossart | 2004-11-23 |
| 6803157 | Pattern mask with features to minimize the effect of aberrations | William A. Stanton, William Baggenstoss | 2004-10-12 |
| 6756167 | Overlay target design method to minimize impact of lens aberrations | Richard Holscher | 2004-06-29 |
| 6675053 | Layout for measurement of overlay error | Tim H. Bossart | 2004-01-06 |