Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822342 | Raised-lines overlay semiconductor targets and method of making the same | Pary Baluswamy, Scott DeBoer, Ceredig Roberts | 2004-11-23 |
| 6675053 | Layout for measurement of overlay error | Pary Baluswamy | 2004-01-06 |