Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6761796 | Method and apparatus for micro-jet enabled, low-energy ion generation transport in plasma processing | Aseem K. Srivastava, Palanikumaran Sakthievel | 2004-07-13 |
| 6740247 | HF vapor phase wafer cleaning and oxide etching | Yong-Pil Han | 2004-05-25 |