Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6796711 | Contact temperature probe and process | Michael B. Colson | 2004-09-28 |
| 6761796 | Method and apparatus for micro-jet enabled, low-energy ion generation transport in plasma processing | Herbert H. Sawin, Palanikumaran Sakthievel | 2004-07-13 |