PS

Palanikumaran Sakthievel

AT Axcelis Technologies: 1 patents #18 of 57Top 35%
📍 Gaithersburg, MD: #37 of 149 inventorsTop 25%
🗺 Maryland: #540 of 2,377 inventorsTop 25%
Overall (2004): #140,662 of 270,089Top 55%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6761796 Method and apparatus for micro-jet enabled, low-energy ion generation transport in plasma processing Aseem K. Srivastava, Herbert H. Sawin 2004-07-13