Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6740247 | HF vapor phase wafer cleaning and oxide etching | Herbert H. Sawin | 2004-05-25 |
| 6712078 | Apparatus for cleaning semiconductor wafer and method for cleaning wafer using the same | Im-Soo Park, Kun-Tack Lee, Sang-rok Hah | 2004-03-30 |