Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6712078 | Apparatus for cleaning semiconductor wafer and method for cleaning wafer using the same | Im-Soo Park, Yong-Pil Han, Sang-rok Hah | 2004-03-30 |
| 6701942 | Method of and apparatus for removing contaminants from surface of a substrate | Moon Hee Lee, Woo-Gwan Shim, Jong Ho Chung | 2004-03-09 |