Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831348 | Integrated circuit isolation system | Helmut Puchner | 2004-12-14 |
| 6822308 | Method of chemically altering a silicon surface and associated electrical devices | Vladimir Zubkov | 2004-11-23 |
| 6759337 | Process for etching a controllable thickness of oxide on an integrated circuit structure on a semiconductor substrate using nitrogen plasma and plasma and an rf bias applied to the substrate | Valeriy Sukharev, John Haywood, James Kimball, Helmut Puchner, Ravindra M. Kapre +1 more | 2004-07-06 |
| 6747358 | Self-aligned alloy capping layers for copper interconnect structures | Paul Rissman, Richard Schinella, Vladimir Zubkov | 2004-06-08 |
| 6743474 | Method for growing thin films | Vladimir Zubkov, Richard Schinella | 2004-06-01 |
| 6673498 | Method for reticle formation utilizing metal vaporization | Vladimir Zubkov, Richard Schinella | 2004-01-06 |