Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831348 | Integrated circuit isolation system | Sheldon Aronowitz | 2004-12-14 |
| 6759337 | Process for etching a controllable thickness of oxide on an integrated circuit structure on a semiconductor substrate using nitrogen plasma and plasma and an rf bias applied to the substrate | Sheldon Aronowitz, Valeriy Sukharev, John Haywood, James Kimball, Ravindra M. Kapre +1 more | 2004-07-06 |
| 6734081 | Shallow trench isolation structure for laser thermal processing | Venkatesh P. Gopinath | 2004-05-11 |
| 6727165 | Fabrication of metal contacts for deep-submicron technologies | Ming-Yi Lee | 2004-04-27 |