Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809824 | Alignment process for integrated circuit structures on semiconductor substrate using scatterometry measurements of latent images in spaced apart test fields on substrate | Colin D. Yates, Nicholas F. Pasch | 2004-10-26 |
| 6759337 | Process for etching a controllable thickness of oxide on an integrated circuit structure on a semiconductor substrate using nitrogen plasma and plasma and an rf bias applied to the substrate | Sheldon Aronowitz, Valeriy Sukharev, John Haywood, James Kimball, Helmut Puchner +1 more | 2004-07-06 |